# SUPPLY AND INSTALLATION OF 3D LASER LITHOGRAPHY SYSTEM TO THE UNIVERSITY OF BIRMINGHAM

> Tender notice from UK public-sector procurement sources.

## Key facts

- Public buyer: [THE UNIVERSITY OF BIRMINGHAM](/buyers/university-of-birmingham/contract-awards)
- Published: 18 November 2016
- Planned start: 1 October 2016
- Planned end: 30 September 2017
- Stage: open_tender
- Procurement category: goods
- Notice ID: f84d5fd9-086d-4eda-9881-b7787e650994-106590
- OCID: ocds-b5fd17-10c1de23-adca-11e6-9901-0019b9f3037b

## Description

The University of Birmingham invites tenders for supply of a - Fastest, most precise and sophisticated 3D laser lithography system for two-dimensional as well as three-dimensional micro- and nanofabrication\. o Pulsed laser system with safety level: Laser class 1 o Laser scan speed: >10 mm/s o Laser with a two-photon polymerization o Lithography accuracy range: submicrometer- to meso-scale, 3 order of magnitude o Lithography minimum lateral features sizes for 2D structure: < 200 nm; for 3D: <= 200 nm o Lithography minimum features sizes for 3D structure in z direction: < 800 nm o Lithography minimum in-plane line distance: < 500 nm o Motorized stage with patterning area >= 100 x 100 mm2, with microscope, integrated camera and LED for region identification and alignment with markers and including rotation and stretching operations o Largest unit structure in 2D mode: >= 400 x 400 um2; in 3D mode: >= 300 x 300 x 300 um3 o Highest structure writing in z direction: >= 3 mm o Different sample holders o Flexible photoresist: generally commercial positive or negative photoresists \(AZ resists, SU-8, etc\.\), and advanced resist which is without spin-coating, softbake, post-exposure bake processes o Fully computer controlled system with corresponding software which is flexible for pattern design files \(123D CAD, SolidWorks, Blender, etc\.\) o Software contains native pattern designer and Pattern designer is 3D-visualized o Autofocus system: auto-recognize the interface of resist and substrate o Automatic error correction: when designed pattern exceeds the scanning size o Intelligent algorithms software: support large volume structure with high writing speed, o System error tolerance: constant aberration along the optical axis \(>= 3 mm\) Additional information: The tender opportunity can be found at : https://in-tendhost\.co\.uk/universityofbirmingham/aspx/Home A Contract Notice was sent to the EU Publications Office for publication in the Official Journal of the European Union on 16/08/2016\. Is a Recurrent Procurement Type? : No https://in-tendhost\.co\.uk/universityofbirmingham/aspx/

## Related contract awards

- [Framework Agreement for the Provision of Construction Project Management Consultancy Services](/contracts/ocds-b5fd17-8387c24c-4125-4c1b-93eb-dd4c1524c16c): THE UNIVERSITY OF BIRMINGHAM
- [Aston Webb Student Precinct - West Phase - QS & PD](/contracts/ocds-b5fd17-dc1ff931-2066-482f-8e43-84eb7cf00f75): THE UNIVERSITY OF BIRMINGHAM
- [Life \+ Health Sciences Cluster - QS & PD](/contracts/ocds-b5fd17-1a4783ed-fbf7-4a36-86f3-18783acd9841): THE UNIVERSITY OF BIRMINGHAM

## Source

[View the original notice on Contracts Finder](https://www.contractsfinder.service.gov.uk/Notice/f84d5fd9-086d-4eda-9881-b7787e650994-106590)