# Inductively-Coupled Plasma Reactively Ion Etching \(ICP-RIE\) System

> Tender notice from UK public-sector procurement sources.

## Key facts

- Public buyer: [University of Bristol](/buyers/university-of-bristol/contract-awards)
- Tender value: £350,000
- Published: 23 December 2016
- Planned start: 20 February 2017
- Planned end: 19 February 2022
- Stage: open_tender
- Procurement category: goods
- Notice ID: 870d8a6f-2bc5-4d5a-b5ee-9279806cac06-122750
- OCID: ocds-b5fd17-14d511db-1474-4ff8-a251-4a34060ec964

## Description

We want to acquire an Inductively-Coupled Plasma Reactively Ion Etching \(ICP-RIE\) system\. The system should be able to etch the surface of samples utilising RIE physical-chemical mechanism\. The System will be located in a class 10000 cleanroom space and will be operated by students and technical staff\. The System should integrate smoothly with the existing facilities without any prejudice for the normal operation\. The main purpose for the System is the definition of silicon and silicon-related waveguide structures for integrated quantum photonics applications\. Such structures are typically defined on 6-inch silicon-on-insulator wafers with 220nm-thick crystalline silicon films\. The system should excel at verticality \(

## Related contract awards

- [Chemical Structure Drawing Software \(SaaD\) \(2026-2029\)](/contracts/ocds-b5fd17-779b7be1-8bb4-4034-a7ef-d399ac9050da): University of Bristol
- [Object Structural Clinical Exam \(OSCE\) and assessment software 2026- 2030](/contracts/ocds-b5fd17-e4ef0a7b-445b-468b-89b7-4c799c434a23): University of Bristol
- [University of Bristol - Purview, Copilot Guardrails and Power Platform Ecosystem Programme](/contracts/ocds-b5fd17-2f8b8708-3779-4701-8cea-9ffeaeb0d774): University of Bristol

## Source

[View the original notice on Contracts Finder](https://www.contractsfinder.service.gov.uk/Notice/870d8a6f-2bc5-4d5a-b5ee-9279806cac06-122750)