908 - Direct-Write Optical Lithography Tool

The College of Engineering and Physical Sciences (EPS) at Aston university is creating a III-V semiconductor fabrication facility. At this time, we are seeking a single supplier to provide a direct-write optical lithography system/tool to pattern photoresist directly on semiconductor wafers of up to 8" for photonics and electronic devices.

The full project specific requirements and equipment specification can be found within the project question set on Aston University's e-tendering portal ProContract under Section 11 - Project Specific Requirements.