# 904 - Compound Semiconductor Plasma Processing Equipment

> Tender notice from UK public-sector procurement sources.

## Key facts

- Public buyer: [Aston University](/buyers/aston-university/contract-awards)
- Tender value: £1,200,000
- Published: 28 November 2023
- Planned start: 1 November 2024
- Planned end: 31 October 2028
- Stage: open_tender
- Procurement category: goods
- Notice ID: 6be2440e-7977-4792-b353-44a668924856-702584
- OCID: ocds-b5fd17-5591d796-f4b0-448b-bf31-74bb59c2bb93

## Description

The College of Engineering and Physical Sciences \(EPS\) at Aston university is creating a III-V semiconductor fabrication facility\. As a consequence, we are seeking a single supplier to provide a suite of plasma processing tools for: • ICP Etch of semiconductor materials \(e\.g\. GaAs, GaN, InP, GaSb\) • RIE Etch of dielectric materials \(e\.g\. SiO2, SiNx\) and metals \(e\.g\. Au, Ge, Cr, Ti, Pt, Pd\) • Deposition of dielectric layers \(e\.g\. SiO2, SiNx\) The full project specific requirements and equipment specification can be found within the project question set on Aston University's e-tendering portal ProContract under Section 11 - Project Specific Requirements\.

## Related contract awards

- [Data and Analytics](/contracts/ocds-b5fd17-0b6f9b28-bd83-4aa6-ac53-57caf2fd7bf8): ASTON UNIVERSITY
- [Adobe ETLA](/contracts/ocds-b5fd17-ca43f035-22f9-4eb6-af4d-4ee8ca728d4b): ASTON UNIVERSITY
- [TextTool & ReadWrite](/contracts/ocds-b5fd17-db5509df-6391-4548-9087-a0ef18969b72): ASTON UNIVERSITY

## Source

[View the original notice on Contracts Finder](https://www.contractsfinder.service.gov.uk/Notice/6be2440e-7977-4792-b353-44a668924856-702584)