T22/0036 - Thin Film Sputtering Fabrication Facility

The University intends to procure a new thin film magnetron sputtering facility for the fabrication of energy materials, biocompatible and functional coatings. TF-FAB provides a platform for researchers to develop new inorganic thin films for energy materials, biocompatible and functional coatings. It supports unprecedented recent growth in thin film research at Northumbria University (NU). TF-FAB provides a transformational capacity increase in thin film fabrication and will create new collaborative opportunities between academia and industry. We are looking for a dual chamber sputtering system and interconnecting load lock.

We are looking for maximum flexibility (hardware and software) and also an upgradable system. We anticipate that one chamber will be more geared towards the deposition of oxide and compound materials (chamber 1) while the other would be more metal focus, including diamond like carbon coatings and titanium based alloys (chamber 2).