Microfabrication Suite

The University of Warwick has a requirement to purchase a microfabrication suite which will enable early career researchers to create micro devices, including microfluidic devices, sensors and actuators, energy harvesting devices, structured interfaces, by structuring/interfacing functional materials on a range of substrate (using e.g. lift-off).

This tender has been divided into the following lots:

1.1.1 1x Mask Aligner (> ?35k) Up to 4 inch wafer. Wavelength ~360 nm, Adjustable power up to 44mW/cm2. Ideally, LED based.

1.1.2 1x Spin coater + 1 Vacuum pump (> 10k) Up to 4 inches wafers. Up to 12000rpm, Polypropylene housing. Vacuum chuck for wafer. Vacuum chuck for fragments. Alignment tool. Removable process chamber liner.

1.1.3 1x Plasma cleaner/bonder + 1 high vacuum pump (~ 10k) Compatible with O2. Supplied with Vacuum Gauge. For samples up to 10x10 cm.

1.1.4 1x Hot plate (

Additional information: Please refer to http://in-tendhost.co.uk/universityofwarwick for further information. You will be able to download the full tender documents from this site. Any queries in relation to this requirement should be directed to the University of Warwick via the correspondence functionality of the In-tend system. Failure to do so may result in queries being excluded from the procedure.

The University of Warwick is not a contracting authority for the purposes of the Public Contracts Regulations 2015 (as amended) and its procurement activities are not subject to the Public Contracts Regulations 2015 or the obligations under the European Public Procurement Directives, including the European Remedies Directive. Advertisement of any contract in the Official Journal of the European Union or Contracts Finder is at the sole discretion of the University and is undertaken on a voluntary basis with no implied obligation to comply with the procurement legislation.

Is a Recurrent Procurement Type? : No