# 3674/JN - Atomic Layer Deposition \(ALD\) System

> Contract award record from UK public-sector procurement sources.

## Key facts

- Public buyer: [UNIVERSITY OF SHEFFIELD](/buyers/university-of-sheffield/contract-awards)
- Contract winner: Semiconductor Production Systems Ltd
- Award value: £101,890
- Tender value: £100,000
- Award date: 5 April 2023
- Published: 24 April 2023
- Contract start: 27 April 2023
- Contract end: 28 April 2023
- Stage: awarded
- Procurement category: goods
- Notice ID: 9a0c0724-e13f-4741-a031-1ce59b45b5ea-638681
- OCID: ocds-b5fd17-783f1f06-2a23-43f4-8dc9-56b00e358fed

## Description

The Department of Physics and Astronomy at The University of Sheffield, requires an atomic layer deposition \(ALD\) system for the growth of ultra-thin layers of metal oxides on substrates for use in a range of optoelectronic devices\. The system needs to be capable of depositing a range of metal oxides \(in particular Al2O3, TiO2, SnOx and InOx\) onto substrates which are placed on a sample holder with a circular diameter of ~150mm\. The predominant use of this system will be to deposit metal oxide layers within metal halide perovskite semiconductor devices\. This requires a system which can ensure substrates are held at various temperatures ranging from 50°C to 200°C during deposition\. This system shall be used to deposit thin films on substrates of different textures\. Therefore, conformality of the resultant films is a key requirement\. The instrument needs to be a tabletop instrument and must be cleanroom compatible\. This is an open exercise\. The ITT can be downloaded by registering and expressing your interest on the University\`s e-tendering system https://in-tendhost\.co\.uk/sheffield If you have any questions or comments in relation to this tender they must be submitted via the In-tend system, this can be accessed at https://in-tendhost\.co\.uk/sheffield Completed tenders must be returned through the same e-tendering system\.

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## Source

[View the original notice on Contracts Finder](https://www.contractsfinder.service.gov.uk/Notice/9a0c0724-e13f-4741-a031-1ce59b45b5ea-638681)