Provision of a 200mm Spectroscopic Ellipsometer

The SNC (Southampton nanofabrication Centre) wants to purchase a Spectroscopic Ellipsometer capable of handling 200mm wafers. Spectroscopic Ellipsometery is an essential characterisation technique for the facility and is used daily to rapidly qualify the majority of all lithographic, deposition and etch processing. Throughput, measurement speed, and sample flexibility are important factors to this procurement.