Tender notice
202122/547 Supply of up to four dry etch and deposition systems
Notice details
- Published
- Category
- goods
- Buyer region
- Yorkshire and The Humber
- Source
- View official notice
Public buyer
Public buyer
University of LeedsTender value£25,000,000
- Planned startAs published in the notice
- Planned endAs published in the notice
Work description
The University of Leeds is seeking tenders for four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)
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£38,265 ·