# 202122/547 Supply of up to four dry etch and deposition systems

> Tender notice from UK public-sector procurement sources.

## Key facts

- Public buyer: [University of Leeds](/buyers/university-of-leeds/contract-awards)
- Tender value: £25,000,000
- Published: 15 February 2022
- Planned start: 31 July 2022
- Planned end: 31 July 2023
- Stage: open_tender
- Procurement category: goods
- Notice ID: 86974b3b-698c-47ec-8c2b-ab6bd736958f-510473
- OCID: ocds-b5fd17-9ec2cb51-018e-4038-bfb0-6ad434a92fce

## Description

The University of Leeds is seeking tenders for four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher \(D-RIE\) •An Inductively Coupled Plasma-RIE \(ICP-RIE\) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system \(HDP-CVD\)

## Related contract awards

- [GB-Leeds: 202526 5793 Cell Disruptor](/contracts/ocds-b5fd17-e664e96e-1cea-4381-b6ed-cb47d62d4930): University of Leeds
- [202526 5916 - research flight services in the Democratic Republic of Congo](/contracts/ocds-b5fd17-22bb7279-f829-460a-b706-c2f02b0e8406): University of Leeds
- [202425 4810a- Supply of Two high precision gas analysers for CO2, CH4, H2O](/contracts/ocds-b5fd17-47c43e6a-a6fa-4463-a570-945761449cf6): University of Leeds

## Source

[View the original notice on Contracts Finder](https://www.contractsfinder.service.gov.uk/Notice/86974b3b-698c-47ec-8c2b-ab6bd736958f-510473)