# Provision of a 300mm Capable High Throughput Electron Beam Lithography System

> Contract award record from UK public-sector procurement sources.

## Key facts

- Public buyer: [UNIVERSITY OF SOUTHAMPTON](/buyers/university-of-southampton/contract-awards)
- Contract winner: JEOL\(U\.K\.\)LIMITED
- Award value: £7,461,509
- Tender value: £7,000,000
- Award date: 8 November 2022
- Published: 12 December 2022
- Contract start: 2 December 2022
- Contract end: 1 December 2038
- Stage: awarded
- Procurement category: goods
- Notice ID: 4f9eacd1-5a66-4358-a96e-1b111d3961d2-597835
- OCID: ocds-b5fd17-a1594fd0-bcb4-419d-b89b-8a7e83f25624

## Description

The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography \(EBL\) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service\. The instrument to be procured will directly replace a JEOL JBX9300FS which suffered a failure in 2021 \(the removal of which is an optional requirement of this tender\)\. The user base for the machine is approximately 40 users\. Tenders or requests to participate must be submitted electronically via the University's electronic tendering portal, In Tend, found at the following address: https://in-tendhost\.co\.uk/universityofsouthampton/aspx/home

## Related contract awards

- [English Language Print Books for Library Stock](/contracts/ocds-b5fd17-cdf2db0a-f046-4de7-beff-d85e0c115758): UNIVERSITY OF SOUTHAMPTON
- [Qlik Licences](/contracts/ocds-b5fd17-0feb1a9d-c1b1-4304-b554-33ede99389d1): UNIVERSITY OF SOUTHAMPTON
- [Provision of Cognos Licences](/contracts/ocds-b5fd17-90b5ef66-0877-46d1-b0a9-841eff154617): UNIVERSITY OF SOUTHAMPTON
- [Standard Service Agreement JEOL-Royce Electron Microscopes 2023-2024](/contracts/ocds-b5fd17-d72d8372-1aa3-47ef-9640-be62af29a03f): UNIVERSITY OF SHEFFIELD
- [IT Services](/contracts/ocds-b5fd17-c08794e4-1e16-43cf-8ed9-b42666b3248c): UNIVERSITY OF PLYMOUTH
- [Service Contract for electron microscope 1st August 2023 - 31st July 2024 to the University of Birmingham](/contracts/ocds-b5fd17-163bce8a-8508-434a-ab77-85874b47ecb9): THE UNIVERSITY OF BIRMINGHAM

## Source

[View the original notice on Contracts Finder](https://www.contractsfinder.service.gov.uk/Notice/4f9eacd1-5a66-4358-a96e-1b111d3961d2-597835)