Skip to content

Contract award record

202122/547 Supply of up to four dry etch and deposition systems

Notice details

Published
Category
goods
Buyer region
Yorkshire and The Humber

Public buyer and contract winner

awarded to

Contract winner

Oxford Instruments

Award value£2,155,581

  1. Awarded
    Completed
  2. Start
    Current phase
  3. End
    Upcoming

Work description

NOTICE OF AWARD OF four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)

Related awards

Source: Contracts Finder · Notice 6a5458b9-7ef6-49e4-9dbe-c720d599dc0d-674848

View source notice