# 202122/547 Supply of up to four dry etch and deposition systems

> Contract award record from UK public-sector procurement sources.

## Key facts

- Public buyer: [University of Leeds](/buyers/university-of-leeds/contract-awards)
- Contract winner: Oxford Instruments
- Award value: £2,155,581
- Tender value: £2,155,581
- Award date: 26 May 2023
- Published: 24 August 2023
- Contract start: 10 December 2023
- Contract end: 10 December 2026
- Stage: awarded
- Procurement category: goods
- Notice ID: 6a5458b9-7ef6-49e4-9dbe-c720d599dc0d-674848
- OCID: ocds-b5fd17-c2282e97-5c3a-4d19-90c0-1fe82ba6b29e

## Description

NOTICE OF AWARD OF four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher \(D-RIE\) •An Inductively Coupled Plasma-RIE \(ICP-RIE\) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system \(HDP-CVD\)

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## Source

[View the original notice on Contracts Finder](https://www.contractsfinder.service.gov.uk/Notice/6a5458b9-7ef6-49e4-9dbe-c720d599dc0d-674848)