GB-Swindon: UKRI-3278 CVD Tool

UK Research and Innovation (UKRI) Science and Technology Facilities Council (STFC) had a requirement to provide a CVD tool which can provide repeatable, accurate deposition of oxide, nitride, oxynitide and amorphous silicon. The system should be able to handle up to 200mm diameter wafers. This was processed on a procurement competition.

Additional information: Procurement Contract Transparency Data: Redacted contract documents will be made available within the next 30 days on the UKRI website at: https://www.ukri.org/about-us/procurement-contract-transparency-data/