# 2741 Ion Miller - University of Leeds

> Contract award record from UK public-sector procurement sources.

## Key facts

- Public buyer: [The University Of Leeds](/buyers/university-of-leeds/contract-awards)
- Contract winner: SCIA SYSTEMS GMBH
- Award value: £442,500
- Award date: 20 March 2017
- Published: 20 March 2017
- Contract start: 31 March 2017
- Contract end: 31 March 2018
- Stage: awarded
- Notice ID: adfa592b-78cb-4ed3-b1ce-1aebd397f6b8-136581
- OCID: ocds-b5fd17-f37d92c7-4426-429a-9781-cdc61d06e3d7

## Description

The School of Electronic and Electrical Engineering at the University of Leeds is seeking tenders for a ion-beam miller / etcher, specifically aimed at etching GMR and other magnetic stacks, alongside III-V semiconductor and quartz etching capabilities, on a wafer size of 100 mm diameter, and on part-pieces mounted on a 100-mm carrier\. The etcher must: be compatible with reactive gases including Cl2, O2 and CF4; have a sample load lock; and have He-backside cooling capabilities \(including MFC control\)\. The system will be used for research and should offer flexibility of use\.

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## Source

[View the original notice on Contracts Finder](https://www.contractsfinder.service.gov.uk/Notice/adfa592b-78cb-4ed3-b1ce-1aebd397f6b8-136581)